TITLE:   Micro-manipulator vision in IC manufacturing

AUTHORS: Dantu, R.V., N.J. Dimopoulos, R.V. Patel and A.J. Al-Khalili

IN:      Proceedings of 1988 IEEE Int. Conf. on Robotics and Automation, 
	 Philadelphia, PA, pp. 1455-1460, Apr. 1988

ABSTRACT
In this paper, we present an overview of a micromanipulator 
vision system for use in automating various functions during 
the testing of a wafer for semiconductor parameters and 
inspection of VLSI circuits. Positioning the probe and 
touching a test pad pose, challenges in the areas of robot 
vision, plan generation and robot control. Vision modules 
and an expert system with hierarchical plan generation to 
control the sequence or plans are described in this paper.